Title |
Effect of surface roughness and release layer on anti-adhesion performance of the imprint template |
Authors |
Duan YG, Li YJ, Ding YC, Li DC |
Publisher |
APPLIED SURFACE SCIENCE ?? |
Volume page |
v 257, n 8, p 3220-3225, Feb. 2011 |
Reference NO. |
SCI:705ZM EI:20110313591524 |
Type |
国际学术期刊 |
Download |
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