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Title Fabrication of high-aspect-ratio microstructures using dielectrophoresis-electrocapillary force-driven UV-imprinting
Authors Li XM, Shao JY, Tian HM, Ding YC, Li XM
Publisher JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume page v 21, n 6,文献编号: 065010 ??出版年: JUN 2011
Reference NO. SCI:769NI EI:20112314037209
Type 国际学术期刊
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