Topic: Development of Multi-Physics and Multi-Scale Simulators on MEMS, Semiconductor, and Tribology Processes
Reporter：Prof. Momoji Kubo
Time：9:30AM 25th Sept. 2015
Location：The fifth western building A-420
Content：
By
the recent advancement of nano-technology, “chemical reaction” at
nano-scale significantly affects the macro-scale property and
performance of MEMS, semiconductor and tribology systems, and then the
electronic-level control of the chemical reactions is essential even in
the MEMS, semiconductor and tribology systems. Especially,
electronic-level understanding of the multi-physics phenomena including
the “chemical reaction” and “friction, impact, stress, fluid, photon,
electron, heat, electric fields etc.” is very important. Previously,
continuum simulations such as finite element method have been employed
for the investigation on the multi-physics phenomena without chemical
reactions at macro-scale. However, quantum chemical approach is
essential for the elucidation of chemical reactions. Hence, we recently
succeeded in the development of new multi-physics simulator based on our
original first-principles and tight-binding quantum chemical molecular
dynamics methods, which enables us to simulate the multi-physics
phenomena including “chemical reaction” and “friction, impact, stress,
fluid, photon, electron, heat, electric fields etc.” We also developed
multi-scale simulator to clarify the effect of “chemical reaction” at
nano-scale on the macro-scale property and performance of MEMS,
semiconductor, and tribology systems (Fig. 2). Moreover, we applied the
above simulators to a wide variety of energy problems, environmental
problems, and nanotechnologies. The detailed information on our
successful applications can be seen at
http://www.kubo.rift.mech.tohoku.ac.jp/eng/theme.html.
The introduction of Prof. Momoji Kubo:
Prof.
Momoji Kubo is a full professor of Institute for Materials Research,
Tohoku University, Japan. He received Bachelor degree in 1990 and Master
degree in 1992 from Department of Hydrocarbon Chemistry, Kyoto
University, Japan. From 1992, he was a research associate, Department of
Molecular Chemistry & Engineering, Tohoku University, Japan. In
1999, he received Ph. D degree from Tohoku University. In 2001, he was
promoted to an associate professor, Department of Materials Chemistry,
Tohoku University and then in 2008 he was promoted to a full professor,
Fracture and Reliability Research Institute, Tohoku University. In 2015,
he moved to Institute for Materials Research, Tohoku University. In
2006, he received the Commendation for Science and Technology by the
Minister of Education, Culture, Sports, Science, and Technology (The
Young Scientists’ Prize) for his pioneering development of multi-physics
quantum chemical molecular dynamics simulator. He received Chemical
Society of Japan Award for Creative Work in 2013 and Award of Society of
Computer Chemistry, Japan in 2015 for his development of multi-physics
and multi-scale computational science technologies.
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