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Home  >  Resources  >  Equipment reservation  >  Micro-Nano Research Center
  • Name：White Light Interferometer
  • Model：CCI 6000
  • Status：Normal
  • Service：Yes
  • Tel：029-83395005
BOOKING
  • Name： Atomic force microscopy
  • Model：Innova
  • Status：Normal
  • Service：Yes
  • Tel：029-83399513
BOOKING
  • Name：Spin Coat-bake System
  • Model：Cee200CB
  • Status：Normal
  • Service：Yes
  • Tel：029-83395005
BOOKING
  • Name：Deep Dry Etching
  • Model：ICP-180
  • Status：Normal
  • Service：Yes
  • Tel：029-83395005
BOOKING
  • Name：Bonding Machine
  • Model：Tton-100
  • Status：Normal
  • Service：No
  • Tel：83395005
BOOKING

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Address:State Key Laboratory for Manufacturing Systems Engineering, No. 99 Yan Cheung Road in Xi'an Fax:710054 E-mail：sklms@mail.xjtu.edu.cn