论文标题: |
Effect of surface roughness and release layer on anti-adhesion performance of the imprint template |
作者姓名: |
Duan YG, Li YJ, Ding YC, Li DC |
刊物名称(出版社): |
APPLIED SURFACE SCIENCE ?? |
年卷期页: |
v 257, n 8, p 3220-3225, Feb. 2011 |
索引号: |
SCI:705ZM EI:20110313591524 |
著作类型: |
国际学术期刊 |
著作简介: |
|
论文下载: |
点击下载
|